SUBMICRON CMOS TECHNOLOGY-lecture notes

• CMOS Technology
• Fundamental IC Process Steps
• Typical Submicron CMOS Fabrication Process
• Summary

• Categories of CMOS technology:
1.) Submicron technology – Lmin 0.35 microns
2.) Deep Submicron technology (DSM) – 0.1 microns Lmin 0.35 microns
3.) Ultra-Deep Submicron technology (UDSM) – Lmin 0.1 microns