Designing decentralized controllers for distributed-air-jet mems-based micromanipulators by reinforcement learning
FREE-DOWNLOADL Matignon, GJ Laurent, N Le Fort-Piat… – Journal of intelligent . Designing Decentralized Controllers for Distributed-Air-Jet MEMS-Based Micromanipulators by Reinforcement Learning . Abstract Distributed-air-jet MEMS-based systems have been proposed to manipu- late small parts with high velocities and without any friction problems.
Novel MEMS dipole monopole antenna for wireless systems operating at 77 GHz
FREE-DOWNLOAD EA Soliman, S Sedky, MO Sallam, S Hassan… – PIERS Online, 2010 Abstract— In this paper, we present a novel MEMS antenna designed for operation at 77 GHz. The antenna consists of two right-angle metal arms which are supported by two vertical silicon walls. These walls are fabricated using bulk micromachining through Deep
Design and Fabrication of MEMS Micropumps using Double Sided Etching
FREE-DOWNLOAD PV MICROPUMP – Journal of Microelectronics and Electronic …, 2010 – AbstractÀIn this paper, we report a simple technique for the fabrication of planar valveless micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch technique. Instead of using several masks and process steps, an anisotropic wet etch