Novel Vibrating Wire Like NEMS and MEMS Structures for Low Temperature Physics
FREE-DOWNLOAD E Collin, J Kofler, JS Heron, O Bourgeois… – Journal of Low …, 2010 . Novel “Vibrating Wire Like” NEMS and MEMS Structures for Low Temperature Physics . Indeed, aluminum-coated “goal-post” shaped MEMS1 were tested in the range 1–30 K, and they displayed perfectly suitable characteristics
Metal Wafer Bonding for MEMS Devices
FREE-DOWNLOAD V DRAGOI, E CAKMAK… – SCIENCE AND TECHNOLOGY, 2010 – Abstract. Metal films can be used as bonding layers at wafer-level in MEMS manufacturing processes for device assembly as well as just for elec- trical integration of different components. One has to distinguish between two categories of processes: metal thermo-compression bonding
Chip-Scale Atomic Devices. Precision Instruments Based on Lasers Atoms and MEMS
FREE-DOWNLOADJ Kitching – 2009 Public reporting burden for the collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of