Nanomembrane-enabled MEMS sensors-Case of plasmonic devices for chemical and biological sensing
FREE-DOWNLOADZ Jakšic… – Micro Electronic and Mechanical The world is witnessing a rapidly increasing need for various types of sensing devices. The requirements are for smaller, smarter and more versatile sensors. The microelectrome- chanical (MEMS) devices represent a natural way to proceed along these lines and it is no wonder that the number .
visual approach on MEMS process modeling using device cross-sections
FREE-DOWNLOAD T Schmidt, M Mielke, K Hahn, R Brück… – Proceedings of …, 2010 – With MEMS entering fast moving consumer mar- kets the need for more efficient design concepts becomes apparent. Without a common technology platform in sight, the only feasible solution seems to be extensive modularization and re-use of existing manufacturing tech- nology
Fully batch-fabricated MEMS magnetic vibrational energy harvesters
FREE-DOWNLOAD N Wang… – PowerMEMS 2009 ( Abstract: This paper reports the fabrication and characterization of fully-integrated, fully-batch-microfabricated electromagnetic vibrational energy harvesters. The 4 – 15 mm3 structures utilize embedded NdFeB powder micromagnet technology, and represent some of the .