Fabrication and performance evaluation of a micro igniter membrane assembly for MEMS thruster array
FREE-DOWNLOAD J Lee, K Kim… – Proceedings of the 8th PowerMEMS, 2009 – Abstract: The fabrication and performance evaluation of a MEMS thruster array assembled with an improved micro igniter are described. We improved the stability of the igniter by using a glass membrane with a thickness of tens of microns. The membrane was fabricated by
Novel mems-based boiler development for low temperature applications
FREE-DOWNLOAD K Prather, H Hemphill, I Pjescic, C Tranter… – Proceedings of the …, 2009 ABSTRACT A novel MEMS-based boiler is fabricated and tested. The device is designed to operate from low-temperature heat sources using capillary action channels. The channels supply working fluid to the heated boiler surface, eliminating the need for tra- ditional working fluid
Fabrication of Electrochemically Deposited Microelectrodes for Microfluidic MEMS Applications
FREE-DOWNLOADAD Bani-Yaseen – Int. J. Electrochem. Sci, 2010 – In this paper the electrochemical deposition of three metals, namely gold, palladium, and platinum over gold microelectrode seeded by titanium thin layer in microfluidic channel has been investigated. Modified microelectrodes were characterized with cyclic voltammetry,