An analog drive loop for a capacitive MEMS gyroscope
FREE-DOWNLOAD L Aaltonen… – Analog Integrated Circuits and Signal …, Abstract The linear model and the design of an analog drive loop for the drive (primary) resonator in a capacitive gyroscope are presented. Four different types of gain control topologies are compared and analyzed with both P- and PI-type controllers. The simple model proposed in […]
Estimates on Pull-In Distances in MEMS Models and Other Nonlinear Eigenvalue Problems
FREE-DOWNLOAD C Cowan… – Motivated by certain mathematical models for Micro-Electro-Mechanical Systems (MEMS), we give upper and lower L∞ estimates for the minimal solutions of nonlinear eigenvalue problems of the form −∆u = λf(x)F(u) on a smooth bounded domain Ω in RN . We are mainly .
Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme
FREE-DOWNLOAD IH Song, YA Peter… – Microsystem Technologies, Abstract This paper presents the theoretical and experimental behaviour of microelectromechanical band- pass filters. The proposed bandpass filter can detect frequencies of monitoring structures with high sensitivity using the resonant frequency of micro-resonator of sen- sor. The